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Control Panel
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- All parameters of ALD vapor puls time and Gas flow are controlled by PLC via a 6" touch screen panel in a mobile cart
- Control Two ALD valves with puls duration time and cycling with mico-second precision
- Control For channels gas delivery with ±0.2%F.S via MFC
- Display vacuum pressure
- Other parameters upon request of the customer
- Please click the picture below to see the control interface
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ALD valve
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- Two ALD valves with pulse controller (min 10 ms duration)
- Capable of heating with thermal actuators
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Dual Zone Split Tube furnace
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- Max 1100ºC for continuous heating
- Two programmable precision digital temperature controllers with 30 segments.
- Two separate controlled Heating Zones
- 200mm length for each heating zone
- 400mm total in heating length
- 250mm constant central temperature heating area if both zones were heated at the same temperature
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500ºC max temperature difference between two zones with thermal blocks in between
- Input power: 208 – 240V AC input, a single phase at max. 4KW
- Optional: ALD control system can be installed with a short tube furnace or rotation tube furnace as the picture below
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Anti-corrosive Pressure Gauge
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- 3.8x10-5 to 1125 Torr measurement range
- Anti-corrosive, gas-type independent
- High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection
- Fast atmospheric detection eliminates waiting time and shortens the process cycle
- Easy to exchange plug & play sensor element
- Click the picture to view detailed spec.
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Vacuum Pump
(optional)
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10E-2 Torr vacuum can be achieved inside the processing tube
- A vacuum pump is not included, suggest you order a dry pump for the CVD process by click the picture below
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More Bubbler
Optional
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- Click the picture below to order bubbler or evaporator for CVD, and below right for
- Could add l and thermocouple to monitoring thin film thickness and temperature at extra cost
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| Update Idea |
- You may use ALD Device to build hybrid Plasma enhanced ALD CVD and ALD PVD CVD system to grow complex materials and Powder ALD with rotation furnace
- (PE-ALD CVD) (PE-ALD PVD CVD)
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Warranty
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One year limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements at related products below).
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Compliance
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- CE certified and NRTLor CSA certification is available upon request at the extra cost.
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Application Notes
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- Tube furnaces with quartz tubes are designed for use under vacuum and low pressure < 0.2 bars / 3 psi
- Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation.
- The flow rate for gasses should be limited to < 200 SCCM for reducing thermal shocks to the tube
- Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
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Click here to learn .
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Application
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- Using ALD to significantly decrease the high solid-solid interfacial impedance between the garnet electrolyte and electrode materials. Related Article:
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Operation Instructions
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