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Control Panel
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- All parameters of Vapor, ALD, and Gas flow are integrated into one mobile cart and controlled by PLC via a 6" touch screen panel:
- Two-Channel ALD valve
- For channels MFC gas delivery
- Please click the picture below to see control interface
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ALD valve
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- Two ALD valves with pulse controller (min 10 ms duration )
- Capable of heating with thermal actuators
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Liquid-Vapor Generator
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- Automatic liquid-vapor generator is included and connects to ALD valve
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Rotation furnace
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Anti-corrosive Pressure Gauge
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- 3.8x10-5 to 1125 Torr measurement range
- Anti-corrosive, gas-type independent
- High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection
- Fast atmospheric detection eliminates waiting time and shortens process cycle
- Easy to exchange plug & play sensor element
- Click the picture to view detail spec.
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Vacuum Pump
( optional)
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10E-2 Torr vacuum can be achieved inside the processing tube
- The vacuum pump is not included, suggest you order a dry pump for CVD process by click picture below
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More Bubbler
Optional
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Click the picture below to order bubbler or evaporator for CVD, and below right ( 1-2) for ( Pic.right 2)
- Could add l and thermocouple to monitoring thin film thickness and temperature at extra cost
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Warranty
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One year limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements at related products below).
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Compliance
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- CE Certified
- NRTL or CSA certification is available upon requesat extra cost.
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Application Notes
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- Tube furnaces with quartz tubes are designed for use under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 Mpa
- Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation.
- The flow rate for gasses should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tube
- Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
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Click here to learn .
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Application
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- Using ALD to significant decrease the high solid-solid interfacial impedance between the garnet electrolyte and electrode materials. Related Article:
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Operation Instructions
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